Hifast Industrial Co. Limited

Model Number: KP - A65 Key Specifications/Special Features: Special features:Monitoring defects and contamination in the bulk region of Si waferKey specifications:Impurities due to heavy metal contaminationCan detect Co, Ni, Ti, Mo, W, Pt, Au and PdCan detect but not identify them uniquelyCan detect and identify Cu and CrIron concentration determination both in CZ and FZ wafers

Requires surface passivation: thermal oxide, chemical passivation or corona charging

Can be combined with the SPV, VQ and JPV

Integrated FOUP and mini environment